Equipment
- Raman spectrometer Jobin Yvon T64000 with INNOVA 400 argon laser,
- LPCVD system,
- PVD – Varian,
- Evaporator e-beam –Varian,
- Scanning electron microscope JEOL T300,
- Diffusion oven with 3 reactors,
- Elipsometer Rudolph Auto EL IV,
- X-ray diffractometer for thin films Siemens D 5000 (not shown on photo).